Manufacturing method of magneto-resistance effect element

A manufacturing method of a magneto-resistance effect element comprising a multilayered structure including two ferromagnetic layers and an intermediate layer sandwiched between the ferromagnetic layers, wherein

• a partition wall having at least one through-hole is provided between a plasma generation space capable of generating plasma and a film-deposition processing space which is provided separately from the plasma generation space and in which a substrate holding part capable of mounting a substrate to be processed is disposed, and also
• the plasma generation space and the film-deposition processing space are connected to each other by the at least one through-hole, and
• the method comprises:
• introducing an active species generated from a first source gas in the plasma generation space into the film-deposition processing space through the at least one through-hole;
• and causing the reactive species to react with a second source gas in the film-deposition processing space to form an insulating protective layer on a multilayered structure formed in the substrate to be processed mounted on the substrate holding part.