Method for producing comb-shaped electrode

A method for producing a comb-shaped electrode, in which a positive electrode and a negative electrode are respectively formed into a comb shape and oppositely disposed so that parts of teeth of the comb shapes are alternatively arranged, the method comprising

• a current collector forming step of forming a conductive layer on a surface of a substrate and patterning the conductive layer into at least a pair of comb shapes to form a current collector,
• a resist coating step of coating a resist composition on the surface of the substrate containing a part of the current collector formed in the current collector forming step to form a resist layer, and
• a guide hole forming step of forming a guide hole for forming the positive electrode or the negative electrode above the current collector by irradiating a surface of the resist layer with light through a mask and developing to remove a part of the resist layer positioned above the current collector,
• wherein the resist composition is one of the resist compositions (i) to (iv) below:
• (i) a cationic polymerization type resist composition containing a compound with an epoxy group and a cationic polymerization initiator,
• (ii) a novolak type resist composition containing a novolak resin and a photosensitizing agent,
• (iii) a chemically-amplified type resist composition containing a resin which has an acid-dissociating elimination group and increases alkali solubility when the elimination group is eliminated by action of an acid generated from a photo-acid-generating agent through exposure and the photo-acid-generating agent, and
• (iv) a radical polymerization type resist composition containing a monomer having an ethylenically unsaturated bond and/or a resin having an ethylenically unsaturated bond, and a radical polymerization initiator in which the number of the ethylenically unsaturated bond per molecule of the monomer is 3 or less when containing the monomer having the ethylenically unsaturated bond.