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US 2011/0256386 A1Published application
Fabrication of Large-Area Hexagonal Boron Nitride Thin Films
AssigneeMassachusetts Institute of Technology
InventorsYumeng Shi, Jing Kong, Christoph Hamsen, Lain-Jong Li
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Abstract
A hexagonal boron nitride thin film is grown on a metal surface of a growth substrate and then annealed. The hexagonal boron nitride thin film is coated with a protective support layer and released from the metal surface. The boron nitride thin film together with the protective support layer can then be transferred to any of a variety of arbitrary substrates.
Claims22
A method for fabricating a hexagonal boron nitride film, comprising:
- providing a growth substrate including a metal surface;
- growing a hexagonal boron nitride film on the metal surface;
- annealing the hexagonal boron nitride film;
- coating the hexagonal boron nitride film with a protective support layer;
- and
- releasing the hexagonal boron nitride film together with the protective support layer from the metal surface.
3 more elements
A hexagonal boron nitride film composite, consisting essentially of:
- a hexagonal boron nitride film with a thickness of 1 nm to 50 nm with an area of at least 1 cm2;
- and
- a protective support layer bound to the hexagonal boron nitride film.
A hexagonal boron nitride film composite, comprising:
- a substrate comprising silica;
- and
- a hexagonal boron nitride film with a thickness of 1 nm to 50 nm with an area of at least about 1 cm2 coating the substrate.
Dependencies are inferred from the claim text.