Hard Carbon Coating and Method of Forming The Same
AssigneeIscar, Ltd.
InventorAlbir A. Layyous
Life of this patent
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Abstract
A coating for cutting tools or wear parts has at least one crystalline SixC1-x-y-zNyMz layer formed by means of a PVD method and at least one hard carbon layer, which is diamond or DLC. Si and C are essential components of the SixC1-x-y-zNyMz layer and M is one or more elements selected from among Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B, Al and Ru (wherein 0.4≦x≦0.6, 0≦y≦0.1, and 0≦z≦0.2). The SixC1-x-y-zNyMz layer has a half-value width of an SiC peak observed at 34° to 36° of diffraction angle when X-ray diffraction (XRD) is carried by using a CuKα ray is 3° or less. A method for forming the coating layer using PVD is carried out under certain temperature and substrate bias conditions.
Claims21
A coated member comprising a coating and a substrate, the coating comprising at least one intermediate layer and at least one hard carbon layer;
- wherein:
- the hard carbon layer comprises diamond or DLC and forms the outermost layer of the coating;
- the intermediate layer comprises a PVD-formed layer having a composition of SixC1-x-y-zNyMz (where 0.4≦x≦0.6, 0≦y≦0.1, and 0≦z≦0.2), wherein Si and C are essential components and M is one or more elements selected from the group consisting of:
- Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B, Al and Ru;
- and
- a half-value width of an SiC peak observed at 34° to 36° of diffraction angle when X-ray diffraction (XRD) is carried by using a CuKα ray is 3° or less.
A coated member comprising a coating and a substrate, the coating comprising:
- a multi-layered structure over the substrate, the multi-layered structure comprising alternating layers of a first layer and an intermediate layer and including a plurality of first layers and a plurality of intermediate layers;
- and
- a laminated structure atop the multi-layered structure, the laminated structure comprising alternating layers of the intermediate layer and a hard carbon layer and including a plurality of intermediate layers and a plurality of hard carbon layers;
- wherein:
- each of the first layers comprises one or more metals selected from the group consisting of:
- Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, wherein the thickness of each of the first layers is from 5 nm to 10 μm;
- each of the intermediate layers comprises a PVD-formed layer having a composition of SixC1-x-y-zNyMz (where 0.4≦x≦0.6, 0≦y≦0.1, and 0≦z≦0.2), wherein Si and C are essential components and M is one or more elements selected from the group consisting of:
- Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B, Al and Ru;
- and wherein a half-value width of an SiC peak observed at 34° to 36° of diffraction angle when X-ray diffraction (XRD) is carried by using a CuKα ray is 3° or less;
- each of the hard carbon layers comprises diamond or DLC;
- the innermost layer of the coating is one of said first layers;
- and
- the outermost layer of the coating is one of said hard carbon layers.
A method of making a coated member comprising a substrate and a coating, the method comprising the steps of:
- (a) depositing, by means of a PVD method, an intermediate layer over the substrate, the intermediate layer having a composition of SixC1-x-y-zNyMz (where 0.4≦x≦0.6, 0≦y≦0.1, and 0≦z≦0.2), where M is one or more elements selected from the group consisting of:
- Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B, Al and Ru, such that a half-value width of an SiC peak observed at 34° to 36° of diffraction angle when X-ray diffraction (XRD) is carried by using a CuKα ray is 3° or less;
- wherein, during PVD deposition, the substrate is kept at a predetermined temperature between 400° C. and 800° C. and a predetermined bias voltage of −30 V to −300 V is applied to the substrate;
- and
- (b) depositing a hard carbon layer on the intermediate layer, the hard carbon layer comprising diamond or DLC.
Dependencies are inferred from the claim text.