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US 2011/0256359 A1Published application
Method and material for a thermally crosslinkable random copolymer
AssigneeInternational Business Machines Corporation
InventorsMatthew E. Colburn, Gregory Breyta
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Abstract
A structure that comprises a substrate; a cross-linked random free radical copolymer on the substrate; and a self-assembled patterned diblock copolymer film on the random copolymer; wherein the random copolymer is energy neutral with respect to each block of the diblock copolymer film. A method of making the structure is provided.
Claims9
A structure comprising;
- a substrate;
- a layer of a cross-linked random free radical copolymer on the substrate;
- and a self-assembled patterned diblock copolymer film over the random copolymer;
- wherein the random copolymer is energy neutral with respect to each block of the diblock copolymer film.
1 more element
Dependencies are inferred from the claim text.