Multi-Laminate Hermetic Barriers and Related Structures and Methods of Hermetic Sealing
AssigneeCorning Incorporated
InventorsVictoria Ann Edwards, Cynthia Baker Giroux, Shari Elizabeth Koval, Mark Alejandro Quesada, Wanda Janina Walczak
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Abstract
A free-standing multi-laminate hermetic sheet includes a first carrier film, a hermetic inorganic thin film formed over the first carrier film, and a second carrier film formed over the hermetic inorganic thin film. A workpiece can be hermetically sealed using the multi-laminate sheet, which can be applied to the workpiece in a step separate from a formation step of either the multi-laminate sheet or the workpiece.
Claims30
A multi-laminate hermetic sheet comprising:
- a first carrier film;
- an inorganic thin film having opposing first and second major surfaces;
- and
- a second carrier film,
- wherein the first major surface of the inorganic thin film is formed over a surface of the first carrier film, and the second carrier film is formed over the second major surface of the inorganic thin film.
A method of encapsulating a workpiece, comprising:
- supporting a workpiece on a substrate;
- forming a multi-laminate hermetic sheet comprising
- a first carrier film,
- an inorganic thin film having opposing first and second major surfaces, and
- a second carrier film, wherein the first major surface of the inorganic thin film is formed over a surface of the first carrier film, and the second carrier film is formed over the second major surface of the inorganic thin film;
- and
- placing the hermetic sheet over the workpiece to form an encapsulated workpiece.
A hermetically-sealed workpiece sealed by a multi-laminate sealing assembly, the multi-laminate sealing assembly comprising:
- a multi-laminate hermetic sheet comprising a first inorganic thin film formed over a surface of a carrier film;
- and
- a gasket member, wherein
- the workpiece is formed on a surface of a substrate;
- the gasket member is disposed on the surface of the substrate peripheral to the workpiece;
- and
- the multi-laminate hermetic sheet is disposed over the workpiece and in hermetic contact with the gasket member.
Dependencies are inferred from the claim text.