Powdered silica, silica container, and method for producing them
AssigneeShin-Etsu Quartz Products Co., Ltd.
InventorsShigeru Yamagata, Tomomi Usui
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AssigneeShin-Etsu Quartz Products Co., Ltd.
InventorsShigeru Yamagata, Tomomi Usui
Estimating the term…
A method is provided for producing a silica container arranged with a substrate, having a rotational symmetry, comprised of mainly a silica, and containing gaseous bubbles at least in its peripheral part, and an inner layer, formed on an inner surface of the substrate and comprised of a transparent silica glass; wherein a powdered silica, having particle diameter of 10 to 1000 μm, containing Ca, Sr, and Ba with the total concentration of 50 to 5000 ppm by weight, and releasing hydrogen molecules with the amount of 3×1016 to 3×1019 molecules/g upon heating at 1000° C. under vacuum, is prepared at least as a powdered raw material for forming the inner layer, and then the inner layer is formed from the powdered silica as the powdered raw material for forming the inner layer.
1-16. (canceled)
A powdered silica for producing a silica container, wherein the powdered silica has particle diameter of 10 to 1000 μm, contains Ca, Sr, and Ba with the total concentration of 50 to 5000 ppm by weight, and releases hydrogen molecules with the amount of 3×1016 to 3×1019 molecules/g upon heating at 1000° C. under vacuum.
A method for producing a powdered silica for production of a silica container, wherein the method comprises:
A silica container arranged with a substrate, having a rotational symmetry, comprised of mainly a silica, and containing gaseous bubbles at least in its peripheral part, and an inner layer, formed on an inner surface of the substrate and comprised of a transparent silica glass;
A method for producing a silica container arranged with a substrate, having a rotational symmetry, comprised of mainly a silica, and containing gaseous bubbles at least in its peripheral part, and an inner layer, formed on an inner surface of the substrate and comprised of a transparent silica glass;
Dependencies are inferred from the claim text.