US 2011/0256003 A1Published application

Dry vacuum pump

AssigneesUlvac, Inc., Mitsubishi Heavy Industries, Ltd.

InventorsEiichiro Ohtsubo, Yoshifumi Maruyama, Hideaki Inoue, Ryousuke Kita, Hirokazu Mizushima

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Abstract

Between an exhaust chamber and a lubrication chamber, a second seal that seals between a cylinder that partitions the exhaust chamber and a first shaft and a first seal that seals between a side cover that partitions the lubrication chamber and the first shaft are provided. A gas introduction space to which a seal gas is supplied is provided between the second seal 2 and the first seal. The second seal and the first seal each have a base part and a pair of ring-like lips extending from the base part toward the first shaft. The pair of lips extends such that the distance therebetween is gradually increased from the base part toward the first shaft, and the tips of the pair of lips can be brought into elastic contact with the first shaft.

Claims14

Dependent claims

A dry vacuum pump comprising:

a shaft that is rotationally driven by an electromagnetic motor;
and
rotors that are attached to the shaft and provided in an exhaust chamber and that suck an exhaust gas in a vacuum processing chamber into the exhaust chamber and discharge the exhaust gas,
wherein, between the exhaust chamber and a next chamber located next to the exhaust chamber, an exhaust-chamber-side seal that seals between an exhaust-chamber partitioning wall portion that partitions the exhaust chamber and the shaft and a next-chamber-side seal that seals between a next-chamber partitioning wall portion that partitions the next chamber and the shaft are provided;
a gas introduction space to which a seal gas is supplied is provided between the exhaust-chamber-side seal and the next-chamber-side seal;
the exhaust-chamber-side seal and the next-chamber-side seal each have a ring-like base part that is fixed to the exhaust-chamber partitioning wall portion or the next-chamber partitioning wall portion and a pair of ring-like lip parts that extends from the base part toward the shaft;
and
the pair of lip parts extends such that the distance therebetween is gradually increased from the base part toward the shaft, and the tips of the pair of lip parts can be brought into elastic contact with the shaft.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application: 13/142,100Filed 6 May 2010
Priority: JP 2009-12249920 May 2009
Published: 20 Oct 2011
Term ends: Not estimatedThe source records don’t support an estimate.

Classification11 codes

F04B 37/14
For special use: to obtain high vacuum
F01C 19/005
Sealing arrangements in rotary-piston machines or engines: structure and composition of sealing elements such as sealing strips, sealing rings and…
F04C 18/123
Of other than internal-axis type: with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with…
F04C 23/001
Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping…: of…