Apparatus and method for controlling heating lamp of rapid heat treatment equipment

A rapid heat treatment apparatus using a group of heat lamps divided into a plurality of subgroups such that electric power is supplied to each of the subgroups to heat a substrate, the apparatus comprising:

• a plurality of power control boards disposed in one-to-one correspondence with the subgroups to supply voltage to the subgroups;
• a plurality of current measuring units disposed between the power control boards and the subgroups so as to be in one-to-one correspondence therewith and measuring actual input current flowing to the subgroups;
• and
• a main controller integrated into the plurality of power control boards to communicate with the plurality of power control boards,
• wherein, when actual input current measured by the current measuring units is fed back to the power control boards, the power control boards send the fed-back actual input current to the main controller, the main controller calculates a difference between reference input current and the actual input current to obtain a calibration value for each of the subgroups by comparing graph data of input voltage-reference input current with graph data of input current-actual input current and sends the calibration value to the corresponding power control boards, and the power control boards apply voltages to the corresponding subgroups according to the corresponding calibration values to uniformly heat a substrate during rapid heat treatment.