Method and system for defect detection
AssigneeApplied Materials Israel Ltd.
InventorsMichael Ben-Yishay, Ophir Gvirtzer
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Abstract
A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel.
Claims10
A method for defect detection, the method comprising:
- retrieving a second pixel of a second image of an object that corresponds to a tested pixel of a first image of the object;
- wherein the first and second images were obtained using different acquisition methods;
- searching a golden matching pixel of a second golden image such that a neighborhood of the golden matching pixel is similar to a neighborhood of the second pixel;
- retrieving a corresponding golden pixel of a first golden image that corresponds to the golden matching pixel;
- comparing between the tested pixel and the corresponding golden pixel;
- and
- identifying defects in the object based on the comparison.
A computer readable medium having computer-readable code for defect detection embodied therein, the computer-readable code comprising instructions for:
- retrieving a second pixel of a second image of an object that corresponds to a tested pixel of a first image of the object;
- wherein the first and second images were obtained using different acquisition methods:
- searching a golden matching pixel of a second golden image such that a neighborhood of the golden matching pixel is similar to a neighborhood of the second pixel;
- retrieving a corresponding golden pixel of a first golden image that corresponds to the golden matching pixel;
- comparing between the tested pixel and the corresponding golden pixel;
- and
- identifying defects in the object based on the comparison.
A system for defect detection, the system comprising:
- a memory unit adapted to store information representative of neighborhoods of pixels within a first image of an object and within a second image of the object;
- and a processor, adapted to:
- retrieve a second pixel of a second image of the object that corresponds to a tested pixel of a first image of the object;
- wherein the first and second images were obtained using different acquisition methods;
- search a golden matching pixel of a second golden image such that a neighborhood of the golden matching pixel is similar to a neighborhood of the second pixel;
- retrieve a corresponding golden pixel of a first golden image that corresponds to the golden matching pixel;
- and compare between the tested pixel and the corresponding golden pixel.
Dependencies are inferred from the claim text.