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US 2011/0255182 A1Published application
Planar flexure system with high pitch stiffness
AssigneeTessera MEMS Technologies, Inc.
InventorsRobert J. Calvet, Xiaolei Liu, Ankur Jain
Life of this patent
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Abstract
A flexure system for miniature camera and the like is disclosed. The flexure system can include a frame and a stage that is configured to move with respect to the frame. One or more flexures can interconnect the frame and the stage. Each flexure can have one or more film hinges formed thereon. The film hinges can be widely spaced and/or extended in length so as to substantially mitigate undesirable pitching of the stage.
Claims20
A method comprising:
- providing a stage mechanically coupled to a frame by a plurality of film hinge flexures, wherein the stage, frame, and film hinge flexures are co-planar, and wherein the stage and frame have a first thickness and the film hinge flexures have a second thickness that is less than the first thickness;
- and
- actuating the stage out-of-plane with respect to the frame by flexing the film hinge flexures, wherein each film hinge flexure is spaced apart from the remaining film hinge flexures so as to inhibit pitching of the actuated stage with respect to the frame.
A method, comprising:
- providing a stage and a frame mechanically coupled through a connecting member, wherein a proximal end of the connecting member includes a first film hinge and wherein a distal end of connecting member includes a second film hinge connected to the stage, and wherein the stage includes a linearizing flexure connected to the first film hinge;
- actuating the stage out-of-plane with respect to the frame by flexing the first and second film hinges;
- and
- while the stage is actuating, bowing the linearizing flexure with respect to the frame to accommodate an out-of-plane movement of the stage.
1 more element
Dependencies are inferred from the claim text.