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US 2011/0255181 A1Published application
Replacement apparatus for an optical element
AssigneeCarl Zeiss SMT GmbH
InventorsJens Kugler, Franz Sorg, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner
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Abstract
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
Claims35
An optical system, comprising:
- a housing having an interior, an exterior, an inner diameter and an opening;
- a first optical element;
- a mount configured to secure the first optical element in the interior of the housing;
- a second optical element disposed on the mount, the second optical element having a maximum diameter that is at most 0.866 times the inner diameter of the housing;
- and
- a holder configured to move between the interior of the housing and the exterior of the housing via the opening in the housing,
- wherein the second optical element is capable of being removed from the interior of the housing via the holder, and the optical system is a microlithography optical system.
4 more elements
An optical system, comprising:
- a housing having a periphery, an interior, an exterior and an opening;
- a plurality of spacer elements on the periphery of the housing, the plurality of spacer elements defining the opening of the housing;
- a first optical element;
- a mount configured to secure the first optical element in the interior of the housing;
- a second optical element disposed on the mount;
- and
- a holder configured to move between the interior of the housing and the exterior of the housing via the opening in the housing,
- wherein the second optical element is capable of being removed from the interior of the housing via the holder, and the optical system is a lithography optical system.
5 more elements
Dependencies are inferred from the claim text.