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US 2011/0255146 A1Published application
Manufacturing structure and process for compliant mechanisms
AssigneePixtronix, Inc.
InventorsTimothy J. Brosnihan, Mark B. Andersson
Life of this patent
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Abstract
The invention relates, in various aspects, to systems and methods for MEMS actuated displays that can be driven at high speeds and at low voltages for improved image quality and reduced power consumption.
Claims17
A MEMS device comprising:
- a first narrow beam wherein the first narrow beam completely enclose the boundary of a space.
A method of manufacturing a MEMS device, comprising:
- forming a first narrow beam coupled to a substrate such that the first narrow beam completely encloses the boundary of a space.
Dependencies are inferred from the claim text.