Method of checking an inspection apparatus and method of establishing a measurement variable of the inspection apparatus
AssigneeKoh Young Technology Inc.
InventorHee-Wook You
Life of this patent
Estimating the term…
Abstract
In order to establish a lighting intensity of an inspection apparatus, an inspection board is installed in an inspection apparatus. Then, a width of a histogram of a captured image acquired through a camera of the inspection apparatus is adjusted to avoid from a dark region and a bright region. Thereafter, a lighting intensity of the inspection apparatus is adjusted by adjusting the histogram to be near a middle of a graph. Thus, a setting time of an inspection condition stored in a job file may be reduced to increase the user's convenience, and measurement error due to mis-establishment may be reduced to enhance inspection precision.
Claims16
A method of establishing a lighting intensity of an inspection apparatus, comprising:
- installing an inspection board in an inspection apparatus;
- adjusting a width of a histogram of a captured image acquired through a camera of the inspection apparatus to avoid from a dark region and a bright region;
- and
- adjusting a lighting intensity of the inspection apparatus by adjusting the histogram to be near a middle of a graph.
A method of establishing a lighting intensity of an inspection apparatus, is comprising:
- installing an inspection board in an inspection apparatus;
- providing light to the inspection board while changing a lighting intensity of the inspection apparatus;
- acquiring the light reflected by the inspection board through a camera of the inspection apparatus and acquiring image data of the inspection board;
- acquiring measurement data for establishing the lighting intensity from the acquired image data of the inspection board;
- and
- establishing the lighting intensity of the inspection apparatus based on the measurement data.
A method of checking an inspection apparatus, comprising:
- installing a setting target in an inspection apparatus;
- checking a hardware condition of the inspection apparatus, which includes at least one of a focus condition of a lighting, a moving condition of a grating-moving instrument, a uniformity condition of the lighting and an illumination intensity condition of the lighting by using a test program with respect to the setting target;
- and
- indicating the checked hardware condition of the inspection apparatus to a user.
Dependencies are inferred from the claim text.