Surface inspection device

A surface inspection device for inspecting a surface of a substrate, the surface inspection device comprising:

• a stage for supporting a substrate;
• an illumination unit for illuminating with ultraviolet light a surface of the substrate supported by the stage;
• a light reception system for receiving light from the surface of the substrate illuminated with ultraviolet light and forming an image of the surface of the substrate;
• an imaging element provided with a plurality of pixels, and having an imaging surface in a position for capturing an image imaged by the light reception system, there being provided to the imaging surface a light-receiving portion for receiving and detecting light from the image, and a dead portion for not detecting light, the dead portion established around the light-receiving portion;
• and
• a setting unit for setting a relative position of the imaging element with respect to the image formed on the imaging surface,
• the setting unit setting the relative position so that the imaging element captures a plurality of images in a plurality of relative positions offset by an amount of relative movement that is smaller than a spacing between the pixels, and
• the surface inspection device comprising an image processing unit for generating a synthesized image by arranging and synthesizing, according to the relative positions, the pixels in the plurality of images captured by the imaging element.