Apparatus and method for preventing lamp damage in rapid heat treatment equipment

An apparatus for preventing damage of a lamp for rapid thermal process (RTP) equipment, in which a filament is disposed within a quartz case, comprising:

• a temperature detector detecting a temperature of the quartz case;
• a memory storing standard data of the temperature of the quartz case according to electric power applied to the filament when the quartz case is in a normal state, with real-time data including a real-time temperature detected by the temperature detector and real-time electric power applied to the filament and corresponding to the detected temperature;
• a central processing unit comparing the standard data with the real-time temperature and real-time electric power stored in the memory to determine whether the temperature of the quartz case is normal or abnormal, and, if a determination result is abnormal, generating an alarm signal;
• and
• a display unit receiving the alarm signal from the central processing unit and displaying the alarm signal to a user.