Production methods of electron emitting device, electron beam apparatus, and image display apparatus
AssigneeCanon Kabushiki Kaisha
InventorTamayo Hiroki
Life of this patent
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Abstract
A production method of an electron emitting device is provided, which reduces occurrence of a leak current between a gate and a cathode to which a voltage for driving an electron source is applied. The electron emitting device includes an insulating member having a concave portion on a surface thereof, a gate electrode formed on the insulating member and located opposing the concave portion, a cathode formed on an edge of the concave portion and having a protrusion protruding to the gate electrode. The production method includes steps of forming the concave portion and of forming the cathode after forming the convex portion protruding to the gate electrode at the edge of the concave portion. These steps are performed in this order.
Claims10
A method of an electron emitting device including an insulating member with a concave portion on a surface thereof, a gate electrode formed on a surface of the insulating member and arranged to face the concave portion, and a cathode including a protrusion portion protruding to the gate electrode and arranged at an edge of the concave portion, the method comprising in the following order:
- forming the concave portion;
- and
- forming the cathode after forming a convex portion formed at the edge of the concave portion and protruding to the gate electrode.
An electron emitting device comprising:
- an insulating member with a concave portion on a surface thereof;
- a gate electrode formed on a surface of the insulating member and arranged to face the concave portion;
- and a cathode including a protrusion portion protruding to the gate electrode and arranged at an edge of the concave portion;
- and
- a convex portion formed at the edge of the concave portion and protruding to the gate electrode.
Dependencies are inferred from the claim text.