Electromechanical transducer and production method therefor
AssigneeCanon Kabushiki Kaisha
InventorsYoshitaka Zaitsu, Takehiko Kawasaki
Life of this patent
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Abstract
An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap being disposed therebetween. Dummy cells that are not electrically connected to the cells are provided around the outer periphery of the unit of the cells.
Claims11
An electromechanical transducer including an element, wherein the element comprises:
- a plurality of cells each including a first electrode and a second electrode provided with a cavity being disposed therebetween, the cells being electrically connected in parallel to form a unit;
- and
- a plurality of dummy cells provided around an outer periphery of the unit of the cells, the dummy cell not being electrically connected to the cells, wherein
- a width of a cavity of each of the dummy cells is smaller than a width of the cavity of each of the cells.
(canceled)
A production method for an electromechanical transducer including an element having a plurality of cells each including a first electrode and a second electrode provided with a cavity being disposed therebetween, the cells being electrically connected in parallel to form a unit,
- wherein the production method comprises the step of:
- forming a plurality of dummy cells around an outer periphery of the unit of the cells, the dummy cell not being electrically connected to the cells, wherein
- the dummy cells are formed such that a width of a cavity of each of the dummy cells is smaller than a width of the cavity of each of the cells.
Dependencies are inferred from the claim text.