Electrostatic drive, micromechanical component, and manufacturing method for an electrostatic drive and a micromechanical component

An electrostatic drive, comprising:

• an inner frame;
• at least one intermediate frame which encloses the inner frame;
• an outer frame which encloses the inner frame and the at least one intermediate frame;
• spring elements, wherein each two adjacent frames of the inner, intermediate, and outer frames are connected to one another via at least one of the spring elements, the spring elements being situated in such a way that longitudinal directions of the spring elements are on a common longitudinal spring axis;
• and
• electrode fingers situated on frame bars of the inner frame, the at least one intermediate frame, and the outer frame, and the electrode fingers being oriented parallel to the longitudinal spring axis.

A method of manufacturing an electrostatic drive, comprising:

• situating at least one intermediate frame around an inner frame;
• situating an outer frame around the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected via at least one spring element, and the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements are on a common longitudinal spring axis;
• and
• situating electrode fingers directly on frame bars which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame.

A method of manufacturing a micromechanical component, comprising:

• producing an electrostatic drive by situating at least one intermediate frame around an inner frame, situating an outer frame around the inner frame and the at least one intermediate frame each two adjacent frames of the inner, intermediate, and outer frames being connected via at least one spring element, and the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that longitudinal directions of the spring elements are on a common longitudinal spring axis, and situating electrode fingers directly on frame bars which are oriented parallel to the longitudinal spring axis of the inner frame, the at least one intermediate frame, and the outer frame, wherein the inner frame, the at least one intermediate frame, and the outer frame are configured in such a way that a voltage may be applied between electrode fingers, which are situated on the frame bars of two adjacent frames of the inner, intermediate, and outer frames, and the at least one spring element between the two adjacent frames being configured in such a way that a first frame of the two adjacent frames is rotated around the longitudinal spring axis in relation to the second frame of the two adjacent frames by applying the voltage;
• and
• situating an actuator on the inner frame in such a way that the actuator is rotated around the spring longitudinal axis by applying the voltage between the electrode fingers, which are situated on the frame bars of two adjacent frames of the inner, intermediate, and outer frames.