Vibration damper for vacuum pumps
AssigneeAgilent Technologies, Inc.
InventorsCarmelo QUARTARONE, Luca BONMASSAR, Silvio GIORS, Vincenzo PANDOLFO
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AssigneeAgilent Technologies, Inc.
InventorsCarmelo QUARTARONE, Luca BONMASSAR, Silvio GIORS, Vincenzo PANDOLFO
Estimating the term…
In a vibration damper of a turbomolecular vacuum pump, a vacuum tightness function and a vibration damping function are both performed by one or more toroidal rings made of an elastic material. The elastic rings assume a resting configuration while the vacuum pump is not operating and the damper is at atmospheric pressure, and they assume a compressed configuration while the vacuum pump is operating and the damper is under vacuum conditions. In the compressed configuration, the elastic rings are deformed due to a compression force. This deformation of the elastic rings prevents metal-to-metal contact between the vacuum pump and a vacuum chamber to which the pump is connected through the damper.
A vibration damper disposed between a vacuum pump and a vacuum chamber, comprising:
Dependencies are inferred from the claim text.