Film-forming composition for imprinting, method of manufacturing a structure, and structure
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorYoshiyuki TAKEUCHI
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorYoshiyuki TAKEUCHI
Estimating the term…
A film-forming composition for imprinting that enables a structure to be obtained after coating the composition on a substrate and pressing a mold thereto with low compression pressure, a method of manufacturing a structure using the film-forming composition for imprinting, and a structure obtained thereby. The film-forming composition for imprinting according to the present invention contains a resin and an organic solvent, in which the organic solvent includes a particular solvent having a boiling point of 100 to 200° C. at ambient pressure. When the structure is manufactured, the film-forming composition for imprinting according to the present invention is coated on a substrate to form a resin layer, and after a mold is pressed against the resin layer, the mold is released from the resin layer.
A method of manufacturing a structure comprising:
Dependencies are inferred from the claim text.