Molecular ion generation
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsLudovic Godet, Svetlana Radovanov, Christopher R. Hatem
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Abstract
An apparatus that generates molecular ions and methods to generate molecular ions are disclosed. At least a first species is ionized in an ion source. The first species ions and/or first species combine to form molecular ions. These molecular ions may be transported to a second chamber, which may be an arc chamber or diffusion chamber, and are extracted. The molecular ions may have a larger atomic mass than the first species or first species ions. A second species also may be ionized with the first species to form molecular ions. In one instance, the first and second species are both molecules.
Claims24
A method to generate molecular ions comprising:
- introducing a first species into an ion source;
- forming first species ions from said first species;
- forming molecular ions using said first species ions, said molecular ions having a larger atomic mass than an atomic mass of said first species ions;
- transporting said molecular ions from said ion source to a second chamber;
- and
- extracting said molecular ions from said second chamber.
A method to generate molecular ions comprising:
- introducing a first gas and a second gas into an ion source;
- ionizing said first gas and said second gas to form first gas ions and second gas ions;
- combining said first gas ions and said second gas ions to form molecular ions;
- transporting said molecular ions from said ion source to a second chamber;
- and
- extracting said molecular ions from said second chamber.
A method to generate molecular ions comprising:
- ionizing an alkane species having a formula CaHb in an RF ion source;
- generating a molecular ions having a formula CxHy in said RF ion source from said alkane species, wherein x>a;
- extracting said molecular ions from said RF ion source;
- and
- implanting said molecular ions into a workpiece.
Dependencies are inferred from the claim text.