US 2011/0253531 A1Published application

Composite coating apparatus

AssigneeHon Hai Precision Industry Co., Ltd.

InventorSHAO-KAI PEI

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Abstract

A composite coating apparatus includes a main body, two carrying boards, and two actuators. The main body defines a first chamber and a second chamber with a separating board intervening therebetween. The separating board defines a coating opening intercommunicating with the chambers. The carrying boards are received in the first chamber and rotatably connected to the separating board at two sides of the coating opening. Each carrying board defines a receiving groove for holding a substrate. The actuators are configured for driving the carrying boards to rotate between a first coating position, in which the substrate is exposed to the second chamber for a first coating process carried out in the second chamber via the coating opening, and a second coating position, in which the substrate faces away from the separating board for a second coating process carried out in the first chamber.

Claims4

Dependent claims

A composite coating apparatus, comprising:

a main body defining a first and a second chambers with a separating board intervening therebetween, the separating board defining a coating opening intercommunicating the first and second chambers;
an evaporation source received in the first chamber and facing the coating opening;
a sputter target received in the second chamber and facing the coating opening;
two carrying boards received within one of the first and second chambers and rotatably connected to the separating board, the carrying boards being positioned around the coating opening, each carrying board defining a receiving groove for holding a substrate;
and
two actuators configured for driving the carrying boards to rotate between a first coating position and a second coating position;
wherein when one of the carrying boards is at the first coating position, the substrate held by the carrying board faces and aligns with the coating opening;
when the carrying board is at the second coating position, the substrate held by the carrying board faces away from the separating board.

5 more elements

Dependencies are inferred from the claim text.