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US 2011/0253349 A1Published application
Systems and methods for cooling an optic
AssigneeCymer, Inc.
InventorsAlexander I. Ershov, Robert L. Morse, William N. Partlo, Christopher P. Pate
Life of this patent
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Abstract
Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.
Claims20
A device comprising:
- an optic having a non-planar surface, the non-planar surface having an optically active portion;
- and
- a flow guide directing gas upon said non-planar surface to produce turbulent flow on at least a portion of the optically active portion of said non-planar surface to cool said optic.
A device comprising:
- an optic;
- a laser irradiating said optic;
- and
- a flow guide having a plurality of nozzles arranged to direct gas on said optic during irradiation of the optic to produce turbulent flow on at least a portion of the optic.
1 more element
A method comprising the steps of
- providing an optic;
- irradiating said optic with a laser beam;
- and
- directing a plurality of gas jets on said optic during said irradiating step to produce turbulent flow on at least a portion of the optic.
1 more element
Dependencies are inferred from the claim text.