Solar cell device and method for manufacturing same
AssigneeOerlikon Solar AG, Truebbach
InventorMichal Martinek
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Abstract
It is an object of the present invention to enlarge flexibility with, respect to material selection for transparent conductive oxide layers within a solar cell device especially in view of the respective, material-specific vacuum deposition processes. This object is resolved by a solar cell device which comprises at least one thin film solar cell and an electrically conductive, transparent oxide layer wherein the addressed electrically conductive, transparent oxide layer is of doped TiOx.
Claims12
A solar cell device comprising at least one thin film solar cell and an electrically conductive, transparent oxide layer, said electrically conductive, transparent oxide layer being of doped TiOx, wherein 1.6≦x≦2.
The device of one of claims 1 to 9, wherein x is essentially 2.
A method for manufacturing a solar cell device comprising at least one solar cell and at least one layer of an electrically conductive, transparent oxide comprising depositing said layer of doped TiOx by plasma enhanced chemical vapor deposition of at least TiOx, wherein 1.6≦x≦2.
Dependencies are inferred from the claim text.