US 2011/0253044 A1 · SHOWERHEAD ASSEMBLY WITH METROLOGY PORT PURGE

Abstract

A method and apparatus that may be utilized for chemical vapor deposition and/or hydride vapor phase epitaxial (HVPE) deposition are provided. In one embodiment, the apparatus is a processing chamber that includes a showerhead with separate inlets and channels for delivering separate processing gases into a processing volume of the chamber without mixing the gases prior to entering the processing volume. In one embodiment, the showerhead includes metrology ports with purge gas assemblies configured and positioned to deliver a purge gas to prevent deposition thereon. In one embodiment, the metrology port is configured to receive a temperature measurement device, and the purge gas assembly is a concentric tube configuration configured to prevent deposition on components of the temperature measurement device. In one embodiment, the metrology port has a sensor window and is configured to receive an optical measurement device, and the purge gas assembly and sensor window are configured to prevent deposition on the sensor window.

Claims20

Dependent claims

A showerhead assembly, comprising:

a showerhead having:
a first metrology port defining an interior region and extending through the showerhead;
and
a second metrology port extending through the showerhead;
a first metrology assembly having an optical element that is at least partially disposed within the interior region of the first metrology port;
a first purge gas assembly having a first gas inlet coupled to a purge gas source and configured to direct a purge gas through the interior region of the first metrology port to prevent deposition of material on the optical element;
a second metrology assembly having a sensor window disposed adjacent the second metrology port;
and
a second purge gas assembly having a gas inlet coupled to the purge gas source and configured to direct the purge gas toward the sensor window to prevent deposition of material thereon.

6 more elements

Dependencies are inferred from the claim text.

Showerhead assembly with metrology port purge

Life of this patent

Showerhead assembly with metrology port purge

Life of this patent

Abstract

Claims20