Tetrahalosilane converter

A method of converting a tetrahalosilane into a trihalosilane, comprising

• diluting the tetrahalosilane with hydrogen (H2) to form a mixture having a H2 to tetrahalosilane ratio ranging from four to twelve;
• passing the mixture through a bed consisting essentially of heated silicon oxide particles to convert the tetrahalosilane into the trihalosilane, wherein the mixture is passed through the bed such that a residence time for the mixture ranges from two to six seconds;
• and
• quenching liquid tetrahalosilane and trihalosilane from the mixture after it passes through the bed.