Methods, Apparatuses and Systems for Automatically Determining the State of a Cluster Tool

Abstract

Methods, systems, and apparatuses are disclosed for determining the state of a cluster tool. In one embodiment, the method may include receiving status information for one or more modules of a cluster tool. The method may include defining one or more wafer flows through the cluster tool. Each wafer flow through the cluster tool may include one or more wafer flow steps performed by one or more modules. The method may include determining, with a processing device, the states of the one or more wafer flow steps in response to the status information. The method may include determining, with a processing device, the states of the one or more wafer flows in response to the state of the one or more wafer flow steps. The method may include determining the state of the cluster tool in response to the states of the one or more wafer flows.

Dependencies are inferred from the claim text.