Polishing apparatus, polishing method and pressing member for pressing a polishing tool
AssigneeEbara Corporation
InventorsMasaya SEKI, Kenya Ito, Masayuki Nakanishi
Life of this patent
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Abstract
A polishing apparatus polishes a top edge portion and/or a bottom edge portion of a substrate accurately and uniformly. The polishing apparatus includes a rotary holding mechanism 3 configured to hold the substrate W horizontally and to rotate the substrate W; and at least one polishing head 30 disposed near the peripheral portion of the substrate. The polishing head 30 has at least one protrusion 51a, 51b extending along a circumferential direction of the substrate W, and the polishing head 30 is configured to press a polishing surface of a polishing tape 23 by the protrusion 51a, 51b against the peripheral portion of the substrate W from above or below.
Claims26
A polishing apparatus for polishing a peripheral portion of a substrate, said apparatus comprising:
- a rotary holding mechanism configured to hold the substrate horizontally and to rotate the substrate;
- and
- at least one polishing head disposed near the peripheral portion of the substrate,
- wherein said polishing head has at least one protrusion extending along a circumferential direction of the substrate, and
- wherein said polishing head is configured to press a polishing surface of a strip-shaped polishing tool by said protrusion against the peripheral portion of the substrate from above or below.
A polishing apparatus for polishing a peripheral portion of a substrate, said apparatus comprising:
- a rotary holding mechanism configured to hold the substrate horizontally and to rotate the substrate;
- a polishing head disposed near the peripheral portion of the substrate;
- and
- a tilting mechanism configured to tilt said polishing head with respect to a surface of the substrate,
- wherein said polishing head has a first protrusion and a second protrusion extending along a circumferential direction of the substrate and further has a pressing pad disposed between said first protrusion and said second protrusion, and
- wherein said polishing head is configured to press a polishing surface of a strip-shaped polishing tool by said first protrusion against the peripheral portion of the substrate from above, to press the polishing surface of the polishing tool by said second protrusion against the peripheral portion of the substrate from below, and to press the polishing surface of the polishing tool by said pressing pad against the peripheral portion of the substrate.
A pressing member for pressing a strip-shaped polishing tool against a peripheral portion of a substrate, said pressing member comprising:
- at least one protrusion extending along a circumferential direction of the substrate.
Dependencies are inferred from the claim text.