Chipstack package and manufacturing method thereof
AssigneeSamsung Electronics Co., Ltd.
InventorsKang-Wook Lee, Gu-Sung Kim, Dong-Hyeon Jang, Seung-Duk Baek, Jae-Sik Chung
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AssigneeSamsung Electronics Co., Ltd.
InventorsKang-Wook Lee, Gu-Sung Kim, Dong-Hyeon Jang, Seung-Duk Baek, Jae-Sik Chung
Estimating the term…
A method for manufacturing chip stack packages may include: providing at least two wafers, each wafer having a plurality of chips, and scribe lanes formed between and separating adjacent chips; forming a plurality of via holes in peripheral portions of the scribe lanes; forming connection vias by filling the via holes; establishing electrical connections between the chip pads and corresponding connection vias; removing material from the back sides of the wafers to form thinned wafers; separating the thinned wafers into individual chips by removing a central portion of each scribe lane; attaching a first plurality of individual chips to a test wafer; attaching a second plurality of individual chips to the first plurality of individual chips to form a plurality of chip stack structures; encapsulating the plurality of chip stack structures; and separating the plurality of chip stack structures to form individual chip stack packages.
1-9. (canceled)
A chip stack package comprising:
A chip stack package comprising:
Dependencies are inferred from the claim text.