Resin and photoresist composition containing the same
AssigneeSumitomo Chemical Company, Limited
InventorsIchiki TAKEMOTO, Nobuo ANDO
Life of this patent
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Abstract
The present invention provides a resin obtained by reacting a compound represented by the formula (I): wherein R1 represents a hydrogen atom or a C1-C6 alkyl group, R2, R3 and R4 each independently represents a C1-C6 alkyl group and R1, R2, R3, R4 and A1 are bonded to form a ring, A1 represents a C1-C20 saturated hydrocarbon group in which one or more —CH2— can be replaced by —O—, B1 and B2 each independently represent a C1-C6 alkylene group, L1 and L2 each independently represent a halogen atom, —O—CH═CH2, —O—CH═CH(CH3) or —O—SO2—R′ in which R′ represents a C1-C6 alkyl group or a C6-C20 aryl group, with a polyhydric phenol compound.
Claims9
A resin obtained by reacting a compound represented by the formula (I):
- wherein R1 represents a hydrogen atom or a C1-C6 alkyl group, R2, R3 and R4 each independently represents a C1-C6 alkyl group and R1, R2, R3, R4 and A1 are bonded to form a ring, A1 represents a C1-C20 saturated hydrocarbon group in which one or more —CH2— can be replaced by —O—, B1 and B2 each independently represent a C1-C6 alkylene group, L1 and L2 each independently represent a halogen atom, —O—CH═CH2, —O—CH═CH(CH3) or —O—SO2—R′ in which R′ represents a C1-C6 alkyl group or a C6-C20 aryl group, with a polyhydric phenol compound.
A compound represented by the formula (10):
- wherein s, t and u each independently represent an integer of 1 to 6, L11 and L12 each independently represent a halogen atom, —O—CH═CH2, —O—CH═CH(CH3) or —O—SO2—R″ in which R″ represents a C1-C6 alkyl group or a C6-C20 aryl group.
A process for producing a resin comprising reacting a compound represented by the formula (I):
- wherein R1 represents a hydrogen atom or a C1-C6 alkyl group, R2, R3 and R4 each independently represents a C1-C6 alkyl group and R1, R2, R3, R4 and A1 are bonded to form a ring, A1 represents a C1-C20 saturated hydrocarbon group in which one or more —CH2— can be replaced by —O—, B1 and B2 each independently represent a C1-C6 alkylene group, L1 and L2 each independently represent a halogen atom, —O—CH═CH2, —O—CH═CH(CH3) or —O—SO2—R′ in which R′ represents a C1-C6 alkyl group or a C6-C20 aryl group, with a polyhydric phenol compound.
Dependencies are inferred from the claim text.