Light-shielding film-attached glass substrate and liquid crystal display device
AssigneeAsahi Glass Company, Limited
InventorsTeruo FUJIWARA, Yasuhiko Akao, Takehiko Hiruma, Eiji Ichikura
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Abstract
The present invention relates to a light-shielding film-attached glass substrate including: a glass substrate; and a light-shielding film having a multilayer structure and being formed on the glass substrate, in which the light-shielding film having a multilayer structure includes: a first chromium oxynitride film (CrOx1Ny1); and a second chromium oxynitride film (CrOx2Ny2), each satisfying the following conditions and being laminated in this order from the glass substrate side: 0.15<x1<0.5, 0.1<y1<0.35, 0.4<x1<0.65, 0.03<x2<0.15, and 0.09<y2<0.25.
Claims5
A light-shielding film-attached glass substrate comprising:
- a glass substrate;
- and
- a light-shielding film having a multilayer structure and being formed on the glass substrate,
- Wherein said light-shielding film having a multilayer structure comprises:
- a first chromium oxynitride film (CrOx1Ny1);
- and
- a second chromium oxynitride film (CrOx2Ny2), each satisfying the following conditions and being laminated in this order from the glass substrate side:
- 0.15<x1<0.5,
- 0.1<y1<0.35,
- 0.4<x1+y1<0.65,
- 0.03<x2<0.15, and
- 0.09<y2<0.25.
Dependencies are inferred from the claim text.