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AssigneeSolmates B.V.
InventorsJan Arnaud Janssens, Gerard Cornelis Van Den Eijkel, Jan Matthijn Dekkers, Joska Johannes Broekmaat, Paul Te Riele
Estimating the term…
The invention relates to a method for depositing a material for a target onto a surface of a sample, which method comprises the steps of: irradiating a surface of the target with a laser or electron beam to generate a plume of target material particles; positioning the sample near the plume, such that the target material particles are deposited onto the surface of the sample; rotating the sample around a rotation axis being perpendicular to the surface of the sample onto which the particles are deposited; moving the laser beam along the surface of the target, such that the plume moves in a radial direction in relation to the rotation axis; pulsing the laser beam at a variable frequency.
1-7. (canceled)
A method for depositing a material of a target onto a surface of a sample, which method comprises the steps of:
Dependencies are inferred from the claim text.