Imprint apparatus and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsHiroshi SATO, Hideki INA
Life of this patent
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Abstract
An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, comprises a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces, and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other, wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold.
Claims8
An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, the apparatus comprising:
- a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces;
- and
- a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other,
- wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold.
An imprint apparatus which cures a resin dispensed on a substrate while the resin and a mold are in contact with each other,
- the mold including a porous portion, and
- the imprint apparatus comprising:
- a chuck configured to hold the mold;
- and
- a suction portion configured to draw a gas from the porous portion by suction, so that the gas is drawn by suction via the porous portion from a concave portion of a pattern formed in a pattern portion of the mold which is in contact with the resin, to accelerate filling of the concave portion with the resin.
A method of manufacturing an article, the method comprising the steps of:
- forming a pattern of a resin on a substrate using an imprint apparatus;
- and
- processing the substrate on which the pattern is formed,
- wherein the imprint apparatus is configured to cure a resin dispensed on the substrate while the resin and a pattern surface of a mold are in contact with each other, and comprises:
- a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces;
- and
- a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other,
- wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold.
A method of manufacturing an article, the method comprising the steps of:
- forming a pattern of a resin on a substrate using an imprint apparatus;
- and
- processing the substrate on which the pattern is formed,
- wherein the imprint apparatus is configured to cure a resin dispensed on a substrate while the resin and a mold including a porous portion are in contact with each other, and comprises:
- a chuck configured to hold the mold;
- and
- a suction portion configured to draw a gas from the porous portion by suction, so that the gas is drawn by suction via the porous portion from a concave portion of a pattern formed in a pattern portion of the mold which is in contact with the resin, to accelerate filling of the concave portion with the resin.
Dependencies are inferred from the claim text.