Method of forming electrode
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKazutaka KURIKI
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Abstract
Provided are a method of forming a carbon film which has a reduced number of steps and improved productivity without needing a high-temperature process, and a method of forming an electrode which does not need a binder. A fluororesin film is formed on a surface of a collector, and a surface of the fluororesin film is contacted with an alkali metal such as lithium to perform defluorination and then washed with acid. By this processing, lithium (Li) chemically reacts with fluorine (F) in the fluororesin film, and lithium fluoride (LiF) is generated. Consequently, the fluororesin film is defluorinated, whereby an electrode having a carbon film is formed.
Claims28
A method of forming an electrode comprising:
- forming a fluororesin film on a surface of a collector;
- contacting an alkali metal with a surface of the fluororesin film;
- and
- washing the surface of the fluororesin film with acid, after contacting the alkali metal, thereby forming a film including carbon.
A method of forming an electrode comprising:
- forming a fluororesin film on a surface of a collector;
- contacting an alkali metal with a surface of the fluororesin film by immersing the fluororesin film in a solution in which the alkali metal is dissolved;
- and
- washing the surface of the fluororesin film with acid, after contacting the alkali metal, thereby forming a film including carbon.
A method of forming an electrode comprising:
- forming a fluororesin film on a surface of a collector;
- contacting an alkali metal with a surface of the fluororesin film;
- immersing the fluororesin film in an electrolyte solution in which an alkali metal salt is dissolved, while the surface of the fluororesin film is contacted with the alkali metal;
- and
- washing the surface of the fluororesin film with acid, after contacting the alkali metal, thereby forming a film including carbon.
Dependencies are inferred from the claim text.