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AssigneeTokuyama Corporation
InventorsShouji Iiyama, Tomohiro Yamamoto, Yukihiro Takata, Shinichiro Koyanagi, Kanji Sakata
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When a disproportionated chlorosilane is to be produced by causing a starting material chlorosilane liquid to flow through a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a disproportionation reaction catalyst to carry out a disproportionation reaction, before the disproportionation reaction is carried out, the disproportionation reaction catalyst is brought into contact with a processing gas obtained by diluting a chlorosilane with an inert gas to prevent the deterioration of the disproportionation reaction catalyst at the start of the reaction so as to carry out the disproportionation of the chlorosilane efficiently.
A method of producing a disproportionated chlorosilane, which comprises causing a starting material chlorosilane liquid to flow through a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a disproportionation reaction catalyst to disproportionate it, wherein the step of bringing the disproportionation reaction catalyst contained in the catalyst-packed layer into contact with a processing gas obtained by diluting a chlorosilane with an inert gas before the disproportionation is carried out.
A method of pretreating a disproportionation reaction catalyst for chlorosilanes, comprising the step of bringing a processing gas obtained by diluting a chlorosilane with an inert gas into contact with a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a disproportionation reaction catalyst for chlorosilanes.
Dependencies are inferred from the claim text.