Removable compartments for workpiece stocker
AssigneeDynamic Micro Systems, Semiconductor Equipment GmbH
InventorLutz Rebstock
Life of this patent
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Abstract
The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.
Claims20
A method for improving the operation of a workpiece stocker comprising:
- storing workpieces in the workpiece stocker;
- mating a mating interface of an emergency access port of the workpiece stocker to a portable workpiece removal equipment in the event of a failure of the stocker, wherein the portable workpiece removal equipment is linked to the workpiece stocker to enabling accessing the workpieces;
- and
- removing the workpieces without exposing the workpieces to outside ambient.
A method for improving the operation of a workpiece stocker comprising:
- storing workpieces in individual compartments wherein the individual compartments are removable from the workpiece stocker;
- accessing an emergency access port of the workpiece stocker in the event of a failure of the stocker to access the individual compartments;
- and
- removing the individual compartments from the workpiece stocker.
A method for improving the operation of a workpiece stocker comprising:
- receiving a workpiece container containing workpieces;
- transferring workpieces out of the workpiece container;
- and
- storing bare workpieces in individual compartments wherein the individual compartments are removable from the workpiece stocker;
- wherein the workpiece stocker comprises an emergency access port to enable removing the individual compartments from the workpiece stocker in the event of an equipment failure.
Dependencies are inferred from the claim text.