Leadless media protected fast response rtd sensor and method for making the same

A low mass temperature detector sensor comprising:

• a silicon semiconductor substrate having a top surface and a bottom surface wherein at least the top surface is oxidized and wherein the bottom surface is exposed to an external environment to be measured;
• a bonding layer of titanium disposed on the top surface of the silicon semiconductor substrate;
• a conductive layer of platinum disposed on the titanium layer wherein said platinum layer and titanium layer are etched together into a resistance temperature detector pattern having at least two low resistance electric contacts;
• a plurality of grooves etched into the silicon semiconductor substrate through the bottom surface aligned with the resistance temperature detector pattern;
• a contact glass disposed on the silicon semiconductor substrate to hermetically seal the top surface of the semiconductor substrate, the titanium layer, and the platinum layer wherein said contact glass has apertures aligned with the low resistance contacts;
• and
• a conductive metal-glass frit disposed within the apertures of the contact glass.

A method of making a low mass temperature detection sensor comprising the steps of:

• providing a silicon semiconductor substrate having a top surface and a bottom surface;
• oxidizing at least the top surface of the silicon semiconductor substrate;
• disposing a bonding layer of titanium onto the top surface of the silicon semiconductor substrate;
• disposing a conductive layer of platinum onto the bonding layer of titanium;
• etching a resistance temperature detector pattern in the titanium and platinum layers wherein said pattern has at least two low resistance electric contacts;
• disposing a contact glass onto the silicon semiconductor substrate to hermetically seal the top surface of the semiconductor substrate, the titanium layer, and the platinum layer wherein said contact glass has apertures aligned with the low resistance electric contacts;
• and
• filling said contact glass apertures with a conductive metal-glass frit.