Thermal detector, thermal detection device, and electronic instrument
AssigneeSeiko Epson Corporation
InventorsTakafumi NODA, Jun TAKIZAWA
Life of this patent
Estimating the term…
Abstract
A thermal detector includes a thermal detection element, a support member, and a fixing part supporting the support member. The support member mounts and supports the thermal detection element on a second side thereof with a first side thereof facing a cavity. The support member includes a first layer member disposed on the second side and having a residual stress in a first direction, and a second layer member laminated on the first layer member on the first side and having a residual stress in a second direction opposite to the first direction. A thermal conductance of the first layer member is less than a thermal conductance of the second layer member.
Claims20
A thermal detector comprising:
- a thermal detection element;
- a support member having a first side and a second side opposite from the first side, the support member mounting and supporting the thermal detection element on the second side with the first side facing a cavity, the support member including
- a first layer member having a residual stress in a first direction, the first layer member being disposed on the second side of the support member, and
- a second layer member having a residual stress in a second direction opposite to the first direction, the second layer member being laminated on the first layer member on the first side of the support member,
- a thermal conductance of the first layer member being less than a thermal conductance of the second layer member;
- and
- a fixing part supporting the support member.
Dependencies are inferred from the claim text.