Thermal analyzer
AssigneeSII NanoTechnology Inc.
InventorsKentaro Yamada, Shinya Nishimura, Hirohito Fujiwara
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Abstract
To improve measurement accuracy by eliminating influence of a change of a temperature environment around a furnace of a thermal analyzer, the thermal analyzer includes a multilayer structure of at least two sealed layers for covering the furnace and its surroundings so as to isolate the furnace and its surroundings from an outside. An interlayer of the multilayer structure is loaded with a substance having a heat capacity equal to the heat capacity of a gas inside the furnace.
Claims9
A thermal analyzer that heats and cools a sample placed inside a furnace, to thereby measure a thermal behavior at the time of heating and cooling,
- the thermal analyzer comprising a multilayer structure of at least two sealed layers for covering the furnace and its surroundings so as to isolate the furnace and its surroundings from an outside.
Dependencies are inferred from the claim text.