Method for measuring wear rate
AssigneeTokyo Electron Limited
InventorsTatsuo Matsudo, Chishio Koshimizu
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AssigneeTokyo Electron Limited
InventorsTatsuo Matsudo, Chishio Koshimizu
Estimating the term…
A wear rate measurement method includes thermally coupling a focus ring having a top surface and a bottom surface with a reference piece having a bottom surface facing a susceptor and a top surface facing the focus ring; measuring a first optical path length of a low-coherence light beam that travels forward and backward within the focus ring by irradiating the low-coherence light beam to the focus ring orthogonally to the top surface and the bottom surface thereof; measuring a second optical path length of a low-coherence light beam that travels forward and backward within the reference piece by irradiating the low-coherence light beam to the reference piece orthogonally to the top surface and the bottom surface thereof; and calculating a wear rate of the focus ring based on a ratio between the first optical path length and the second optical path length.
A method for measuring a wear rate of a consumable part having a wear surface exposed to an environment causing the consumable to wear out and a non-wear surface parallel to the wear surface and exposed to an environment without causing the consumable to wear out, the method comprising:
A method for measuring a wear rate of a first consumable part having a wear surface exposed to an environment causing the first consumable part to wear out and a non-wear surface parallel to the wear surface of the first consumable part and exposed to an environment without causing the first consumable part to wear out, and measuring a wear rate of a second consumable part having a wear surface exposed to an environment causing the second consumable part to wear out and a non-wear surface parallel to the wear surface of the second consumable part and exposed to an environment without causing the second consumable part to wear out, the method comprising:
Dependencies are inferred from the claim text.