Pellicle, mounting method therefor, pellicle-equipped mask, and mask

Abstract

A pellicle is provided that includes a pellicle film, a pellicle frame having the pellicle film stretched over one end face thereof and having the other end face open, and a pressure-sensitive adhesion layer for adhering the pellicle frame to a mask, the pressure-sensitive adhesion layer being provided on an inner peripheral face of the pellicle frame, and the pressure-sensitive adhesion layer being capable of adhering to a side face of a mask having a mask image on a front face. There are also provided a method of mounting a pellicle that includes fixing to a side face of a mask an inner peripheral face of a pellicle frame of a pellicle that includes a pellicle film and a pellicle frame having the pellicle film stretched over one end face thereof and having the other end face open, a method of mounting a pellicle that includes adhering the pellicle to a side face of the mask that is inclined in going from the reverse face of the mask toward the front face where the mask image is provided, thus adhering the side face of the mask to the pellicle frame inner peripheral face, a pellicle-equipped mask that includes the pellicle adhered to a mask, and a mask that includes a side face that is inclined in going toward the front face where a mask image is provided.

Dependencies are inferred from the claim text.