Back to results
US 2011/0235014 A1Published application
Optical element holding apparatus, barrel, exposure apparatus, and manufacturing method for device
AssigneeNikon Corporation
InventorYouichi Arai
Life of this patent
Estimating the term…
Abstract
An optical element holding apparatus includes an annular vibration attenuation plate, which covers a peripheral portion of a lens, and a connection member, which is formed of a damping alloy and which fixes the vibration attenuation plate to a frame body in a state of non-contact with the surface of the lens. The vibration attenuation plate and nitrogen gas in a clearance between the vibration attenuation plate and the surface of the lens form a squeeze film damper.
Claims21
An optical element holding apparatus that holds an optical element, the optical element holding apparatus comprising:
- a plate member arranged in a state spaced apart from at least part of a surface of the optical element by a predetermined distance;
- and
- a liquid fluid between the surface of the optical element and the plate member,
- wherein the optical element and the plate member are movable relative to one another.
1 more element
Dependencies are inferred from the claim text.