Piezoelectric element, method for manufacturing the same, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus

A method for manufacturing a piezoelectric element, comprising:

• forming a first electroconductive film having a first surface on a substrate in such a manner that the first surface lies opposite the substrate;
• forming a second electroconductive film having a second surface of a material mainly containing lanthanum nickelate on the surface of the first electroconductive film in such a manner that the second surface lies at the first surface side;
• patterning the first electroconductive film and the second electroconductive film to form a first electrode including a first electroconductive layer and a second electroconductive layer;
• forming a first piezoelectric material film over the first electrode, and crystallizing the first piezoelectric material film by heat treatment;
• patterning the crystallized first piezoelectric material film to form a first piezoelectric layer;
• forming a third electroconductive film over the first piezoelectric layer;
• and
• patterning the third electroconductive film to form a second electrode overlying at least part of the first electrode with the first piezoelectric layer therebetween,
• wherein the first electrode, the piezoelectric layer and the second electrode overlap with each other when viewed in the direction of the normal to the first surface to form an overlap portion acting as a driving portion, and wherein the second electroconductive layer is disposed within the sides of the first surface within the driving portion, and the second surface has a smaller area than the first surface within the driving portion.