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US 2011/0234704 A1Published application
Piezoelectric element, piezoelectric actuator, liquid droplet ejecting head, liquid droplet ejecting apparatus, and method of producing piezoelectric element
AssigneeSeiko Epson Corporation
InventorsHideki Hahiro, Koji Ohashi, Masao Nakayama
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Abstract
The piezoelectric element includes a first electrode disposed on a substrate, a piezoelectric material layer disposed on the first electrode, a second electrode disposed on the piezoelectric material layer, and a protective film covering at least a side surface of the piezoelectric material layer. The side surface of the piezoelectric material layer has a plurality of grooves extending along the direction from the second electrode toward the first electrode.
Claims9
A piezoelectric element comprising:
- a first electrode disposed on a substrate;
- a piezoelectric material layer disposed on the first electrode;
- a second electrode disposed on the piezoelectric material layer;
- and
- a protective film covering at least a side surface of the piezoelectric material layer,
- wherein the side surface of the piezoelectric material layer has a plurality of grooves extending along the direction from the second electrode toward the first electrode.
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A method of producing a piezoelectric element comprising:
- forming a first electrode on a substrate;
- forming a piezoelectric material film on the first electrode;
- forming a piezoelectric material layer by patterning the piezoelectric material film by dry etching;
- forming a second electrode on the piezoelectric material layer;
- and
- forming a protective film covering at least a side surface of the piezoelectric material layer,
- wherein the etching gas in the dry etching is a gas mixture whose main component is a chlorine-based gas containing BCl3.
4 more elements
Dependencies are inferred from the claim text.