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US 2011/0234091 A1Published application
Non-evaporable getter for field-emission display
AssigneeCanon Kabushiki Kaisha
InventorsTadayuki Yoshitake, Takuto Moriguchi, Yoichi Ando
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Abstract
The present invention provides a non-evaporable getter for an FED which can remove a plurality of types of gases. The non-evaporable getter for the FED has a first layer containing titanium, and a second layer containing crystalline zirconium layered on the first layer. The average value of crystalline grain sizes of the crystalline zirconium is 3 nm or more but 20 nm or less.
Claims5
A non-evaporable getter for a field-emission display comprising:
- a first layer containing titanium;
- and
- a second layer containing crystalline zirconium layered on the first layer, wherein
- an average value of crystalline grain sizes of the crystalline zirconium is 3-20 nm.
1 more element
A method of manufacturing a non-evaporable getter for a field-emission display comprising steps of:
- forming a first layer containing titanium;
- and
- stacking, on the first layer, a second layer containing zirconium crystals of which average value of crystalline grain sizes is 3-20 nm.
Dependencies are inferred from the claim text.