Crystal substrate etching method, piezoelectric vibrating reed, a piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece
OwnerYoichi Funabiki, Kiyoshi Aratakeinventors
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Abstract
Provided are a crystal substrate etching method capable of processing with high accuracy, a piezoelectric vibrating reed of which the outer shape is formed by the method, a piezoelectric vibrator having the piezoelectric vibrating reed, and an oscillator, an electronic device, and a radio-controlled timepiece having the piezo-electric vibrator. A crystal substrate and an auxiliary substrate are successively dry-etched from a second surface side of the crystal substrate in a state where the auxiliary substrate having approximately the same etching rate as the crystal substrate is bonded to a first surface of the crystal substrate.
Claims12
A method of etching a crystal wafer comprising:
- securing the crystal wafer onto an auxiliary substrate made of a material which has an etching rate nearly equal to an etching rate of the crystal wafer;
- forming a metal mask on the crystal wafer;
- dry-etching the crystal wafer through the metal mask at a depth deep enough to etch the auxiliary substrate.
Dependencies are inferred from the claim text.