Dry etching apparatus and method for manufacturing touch screen panels using the same

A dry etching apparatus for performing dry etching in the manufacture of a set of touch screen panels on a mother substrate, the apparatus comprising:

• a chamber configured to maintain a high vacuum at an interior thereof;
• an upper electrode in the chamber at an upper portion thereof, the upper electrode configured to apply a high-frequency power source (RF) to the interior of the chamber;
• a lower electrode in the chamber at a lower portion thereof, the lower electrode configured to apply the high-frequency power source to the interior of the chamber;
• a gas injection port configured to inject a compound mixture gas into the chamber;
• an exhaust port configured to exhaust a reactive gas produced in the interior of the chamber;
• and
• a shadow mask disposed above a location on the lower electrode for the mother substrate for the touch screen panels, the shadow mask having a plurality of exposure windows respectively corresponding to a plurality of exposure portions to be formed in individual touch screen panels of the mother substrate.