Apparatus for wet processing substrate

An apparatus for wet processing a substrate, the apparatus comprising:

• a wet processing system comprising:
• a first preliminary rinsing device comprising a first tank and a first spraying system above the first tank, the first tank being configured for collecting water sprayed by the first spraying system;
• a second preliminary rinsing device comprising a second tank and a second spraying system above the second tank, the second tank being configured for collecting water sprayed by the second spraying system;
• a final rinsing device including a third tank and a third spraying system above the third tank, the third tank being configured for collecting water sprayed by the third spraying system;
• and
• a conveyor extending along an arrangement of the first preliminary rinsing device, the second preliminary rinsing device, and the final rinsing device, the conveyor configured for conveying a substrate from the first preliminary rinsing device to the final rinsing device thereby preliminarily rinsing the substrate using the first preliminary rinsing device and then finally rinsing the substrate using the final rinsing device;
• and
• a water supplying system, comprising:
• a supply pipe configured for supplying water to the third spraying system;
• a first connecting system communicating with the third tank and the second spraying system, the first connecting system being configured for supplying water from the third tank to the second spraying system;
• a second connecting system communicating with the second tank and the first spraying system, the second connecting system being configured for supplying water from the second tank to the first spraying system;
• and
• a drain pipe communicating with the first tank, the drain pipe being configured for draining out water in the first tank.

An apparatus for wet processing a substrate, the apparatus comprising:

• a wet processing system comprising:
• a preliminary rinsing device comprising a first tank and a first spraying system, the first tank being configured for receiving water therein, the first spraying system comprising a first conveying pipe, a first upper pipe communicating with the first conveying pipe, and a number of first upper nozzles mounted on the first upper pipe, one end of the first conveying pipe being immersed in the water of the first tank;
• a final rinsing device comprising a second tank and a second spraying system, the second tank being configured for receiving water therein, the second spraying system comprising a second conveying pipe, a second upper pipe communicating with the second conveying pipe, and a number of first upper nozzles mounted on the first upper pipe, one end of the second conveying pipe being immersed in the water of the second tank;
• and
• a conveyor extending along an arrangement of the preliminary rinsing device and the final rinsing device, the conveyor being configured for conveying a substrate from the preliminary rinsing device to the final rinsing device thereby preliminarily rinsing the substrate using the preliminary rinsing device and then finally rinsing the substrate using the final rinsing device, the first and second upper nozzles being opposite to the conveyor;
• and
• a water supplying system, comprising:
• a supply pipe configured for supplying water to the second tank;
• a connecting system communicating with the second tank and the first tank;
• the connecting system being configured for supplying water from the second tank to the first spraying system;
• and
• a drain pipe communicating with the first tank, the drain pipe being configured for draining out the water in the first tank.