Electrode forming method and electrode forming apparatus
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorMasakazu SANADA
Life of this patent
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Abstract
The invention aims at reducing unevenness at the intersections of mutually crossing electrodes with a method of and an apparatus for forming electrodes on a substrate. After forming a number of finger electrodes on a substrate, wide bus electrodes intersecting them are formed by application of an application liquid. Upon applying the application liquid which contains an electrode material and a photo-curing resin to the substrate, the application liquid is irradiated with UV light after a predetermined time and the application liquid is thus made to harden. A time difference since applying until light irradiation is set based on the result of measurement on changes of the height of the application liquid experimentally applied.
Claims11
An electrode forming method, comprising:
- a finger electrode forming step of forming finger electrodes extending in a first direction in a surface of a substrate;
- an applying step of moving a nozzle, which discharges an application liquid containing an electrode material, relative to the substrate in a second direction which is different from the first direction and applying the application liquid to the substrate while making the application liquid crossing the finger electrodes;
- a hardening step of hardening the application liquid after a predetermined time since applying the application liquid to the substrate and accordingly forming bus electrodes;
- and
- a time setting step of setting, prior to execution of the hardening step, the predetermined time based upon a flattening time for flattening the application liquid applied to intersections with the finger electrodes.
An electrode forming method, comprising:
- a finger electrode forming step of forming finger electrodes extending in a first direction in a surface of a substrate;
- an applying step of moving a nozzle, which discharges an application liquid containing an electrode material, relative to the substrate in a second direction which is different from the first direction and applying the application liquid to the substrate while making the application liquid crossing the finger electrodes;
- and
- a hardening step of hardening the application liquid after a predetermined time since applying the application liquid to the substrate and accordingly forming bus electrodes,
- wherein the predetermined time since applying the application liquid until execution of the hardening step is adjusted, thereby controlling the electrode heights at intersections of the finger electrodes and the bus electrodes.
An electrode forming apparatus, comprising:
- a substrate holder which holds a substrate which seats finger electrodes which extend in a first direction;
- a nozzle which discharges an application liquid which contains an electrode material;
- a mover which moves the nozzle relative to the substrate in a second direction which is different from the first direction;
- a hardener which hardens the application liquid applied to the substrate;
- and
- an adjuster which adjusts a time since application of the application liquid to the substrate until hardening performed by the hardener.
Dependencies are inferred from the claim text.